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关于旋转载体用硅微机械陀螺信号研究 被引量:3

Research on the signal of micro-machined silicon gyroscope for rotating carrier
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摘要 在硅微机械陀螺研究中,利用硅微机械陀螺信号来获取旋转载体的偏转方向和偏转角度是两个很重要的问题。首先介绍利用相位法获取旋转载体的偏转方向理论,然后详细讨论利用包络积分的方法来获取偏转角度大小的思想。相位法确定偏转方向是利用重力加速度计作为参考信号,利用陀螺与重力加速度计信号的相位差判断载体的偏转方向。积分法确定偏转角度大小,主要是用单片机采样代表载体偏转角速度大小的陀螺信号的峰值点,然后再对时间积分,求出偏转角度的大小。 It's important to get the deflexion direction and the deflexion angle by the signal of gyroscope in the research on the gyroscope. This paper makes a detailed discussion of an envelope integral method for getting deflexion angle, and also gives a introduction to the issue of getting deflexion direction in the phase method. In order to get deflexion direction, the signal of gravity acceleration-meter as reference is needed and then the signal of the gyroscope and gravity acceleration-meter are compared. The phase differences are then figured out. At last, the deflexion direction is made out by the phase difference. Using MCU to find out the peak value of the gyroscope signal and the integral to time,the deflexion angle is counted out.
出处 《北京机械工业学院学报》 2008年第2期5-9,共5页 Journal of Beijing Institute of Machinery
基金 国家自然科学基金项目(60627001) 北京市传感器重点实验室开放课题(KM200710772017)
关键词 微机械陀螺 偏转方向 偏转角度的大小 micro-machined gyroscope deflexion direction deflexion angle
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  • 1张福学,王宏伟,张伟,毛旭,张楠.利用旋转载体自身角速度驱动的硅微机械陀螺[J].压电与声光,2005,27(2):109-117. 被引量:17
  • 2MAENAKA K, SHIOZAWA T. A study of silicon angular rate sensors using anisotropic etching technology[J]. Sensors and Actuators A, 1994,43:72-77.
  • 3MIZUNO J, NOTTMEYER K, CABUZ Cleopata ,et al. Fabrication and characterization of a silicon capacitive structure for simultaneous detection of acceration and angular rate [C]. Sweden The 8th International Confence on Solid-State Sensors and Actuators, and Eurosensors Stockholm,1995: 679-682.
  • 4MAENAKA K, FUJITA T, KONISHI Y, et al.Analysis of a highly sensitive silicon gyroscope with cantilever beam as vibrating mass [J]. Sensors and Actuatous, 1996,54: 568-573.
  • 5DEGANI O,Seter Dan J, SOCHER Eran, et al. Optimal design and noise consideration of micromachined vidrating rate gyroscope with modulated integrative differential optical sensing [J]. Journal of Microelectromechanical Systems, 1998,7 (3): 329-338.
  • 6Jorg R. Kaienburg, Ralf Schellin. A novel silicon surface micromachining angle sensor[J]. Sensors and Actuators, 1999, 71: 542-556.
  • 7Toshiyuki Tsuchiya, Yasuyuki Kageyama, Hirofumi Funadashi, et al. Vibrating gyroscope consisting of three layers of polysilion thin film [J]. Sensors and Actuators, 2000, 82:114-119.
  • 8Yoichi Mochida, Masaya Tamura, Kuniki Ohwada. A micromachined vidrating rate gyroscope with independent beams for the drive and detection modes[J]. Sensors and Actuators, 2000,80:170-178.
  • 9Zhihong Li, Zhenchuan Yang,Zhixiong Xiao, et al. A bulk micromachined vidratory lateral gyroscope fadricated with wafer bonding and deep trench etching[J].Sensors and Actuators, 2000,83: 24-29.
  • 10Mochija Y,Tamura M,Ohwada K.A micromachined vibrating rate gyroscope with independent beams for the drive and detection modes[J].Sensors and Actuators,2000,80:170~ 178

共引文献23

同被引文献15

  • 1张福学,王宏伟,张伟,毛旭,张楠.利用旋转载体自身角速度驱动的硅微机械陀螺[J].压电与声光,2005,27(2):109-117. 被引量:17
  • 2张福学,毛旭,张伟.旋转体自身驱动的硅微机械陀螺[J].中国工程科学,2006,8(8):23-27. 被引量:9
  • 3张福学,王宏伟,张伟,毛旭,张楠.旋转载体驱动硅微机械陀螺的设计和性能检测[J].电子元件与材料,2006,25(12):20-26. 被引量:5
  • 4ZHANG F X, WAND H W, ZHANG W, et al. The Structure Principle of Silicon Micro-machined Gyroscope Driven by the Rotating Carrier. Proceeding of the IEEE International Journal of Information Acquisition, 2005, 2 (3): 11-18.
  • 5ZHANG F X, WAND H W, ZHANG W, et al. Design and Performance Detecting of Silicon Micro - machined Gyroscope which is Driven by Rotating Carrier. Electronic Component and Stuff, 2006, 25 (12): 20 -26.
  • 6WU L F , Z HANGF X . Effect of the Temperature on the Performance of Silicon Micro-machined Gyroscope Using for Rotating Carrier. 2008 Chinese Control and Decision Conference, Yantai, 2008.
  • 7苗瑞生 吴甲生.旋转弹空气动力学.力学进展,1987,17(4):479-488.
  • 8Wang L,Zhang F X.Research on rotating and non-rotating carrier gesture demodulation based on MEMS gyroscope[D].Beijing:Beijing University of Posts and Telecommunications,2010:1-17.
  • 9Xiao Wei,Tu Yaqing,Su Dan,et al.A frequency estimation algorithm based on spectrum correlation of multi-section sinusoids with the known frequency-ratio[J].10th World Congress on Intelligent Control and Automation(WCICA),2012,1109(10):4385-4389.
  • 10徐晓松,范京,刘海林,肖健明,张福学.旋转载体用硅微机械陀螺的相位研究[J].北京机械工业学院学报,2008,23(2):1-4. 被引量:2

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