强流金属离子注入层的高分辨观察

HIGH RESOLUTION OBSERVATIONS ON LARGE FLUX METAL ION-IMPLANTED LAYERS

用高分辨电镜可以看到强束流（＞0．35A·m-2）钇注入铝、铁注入银样品中析出的纳晶（YAl3，Fe）与基体（Al，Ag）之间相界清楚．界面附近原子排列连贯，没有过渡相．由于银和铁的结构特点，铁沉淀在单晶银中呈球形或棒形，并有各自的择优生长取向．

Large flux (>3.5 × 10-5 A·cm-2) Y-implanted aluminum and Fe-implanted siliver are investigated by using a high resolution electron microscope of model JEOL2000 EX-II. It was found that the interfaces between precipitates (YAl3 in Al, Fe in Ag) and matrix are dear. The ape of atomi are coheren with no transition phases. Because of the unique combination of Fe and Ag atorns, precipated Fe nanocrystal in single crystalline siliver matrix is either spherical or cylinrical in shape. And they have preffered orientation:[110]Ag,