利用飞秒激光双光子聚合法制作达曼光栅

Dammann Grating Created by Femtosecond Laser via Two-photon Photopolymerization

使用中心波长为800nm的飞秒激光振荡器,通过研究双光子聚合工艺,得出降低加工功率、曝光时间以及提高加工速度,有利于空间分辨率的提高.在上述研究结果的基础上制作了一个1×7点阵的达曼光栅,制作结果表明双光子聚合技术在制作微光学元件方面有着非常好的应用前景.

After studying the relationship among feature size, exposure time, laser power and processing speed, we fabricated a 1 × 7 Dammann grating using femtosecond laser oscillator, which central wavelength is 800 nm, via two-photon photopolymerization, The result shows that lower power and exposure time and higher processing speed lead to smaller feature size and the two-photon photopolymerization technology has extremely good prospect in the manufacture of microoptical elements domain.