基于非硅表面微加工的MEMS惯性开关设计与动力学仿真

Design and dynamics simulation of MEMS inertia micro-switch based on non-silicon surface micromachining

基于非硅表面微加工技术,设计了一种新的MEMS微型惯性电学开关。较厚的质量块可动电极和位于其上方悬空的弹性梁固定电极,不但有利于提高开关器件的触发灵敏度和接触效果,而且可避免质量块和弹簧过多偏离对器件造成的损坏。对所设计开关进行了有限元动态接触仿真,结果表明开关在100g加速度作用下的响应时间和接触时间分别约为0.24ms和10μs,表现出较高的触发灵敏度和良好的接触效果,随加速度的增加惯性开关的响应时间减小,两电极的接触时间增加。

A novel MEMS inertia micro-switch has been designed basing on non-silicon surface micromachining technology.The switch mainly consists of a thicker mass block as mobile electrode and a suspended elastic beam as fixed electrode locating above the mass block.The designed switch structure not only benefits the improvement of the sensitivity and the contact effect,but also protects the switch against shock damage owing to too much deviation of the mass block and the snake springs.The dynamics finite element contact simulation about the designed switch has been done.The results show that the response time and the contact time of the switch is about 0.24ms and 10μs respectively when 100g acceleration was applied,which is relatively better sensitivity and contact effect.The response time of the inertia micro-switch would decrease when applied acceleration was increased,and the contact effect between two electrodes would be enhanced.