摘要
通过观察场发射扫描电子显微镜下非导电样品镀膜前后纳米尺度的形貌变化,发现镀膜对样品在几个纳米范围内的形貌有一定的影响和遮盖,分析了使用场发射扫描电镜观察样品高倍数形貌时应注意的问题,并给出了获取真实形貌的方法.
The different topography of the non-conducting samples with/without coating was observed and investigated by using FEG SEM. The results obtained demonstrate that the micro topography of nanometer order could be effected or covered in a certain extent. Accordingly, the observation methods and advice were suggested for non-conducting samples, which are not proper for coating with gold.
出处
《分析测试技术与仪器》
CAS
2008年第2期120-124,共5页
Analysis and Testing Technology and Instruments
