摘要
采用MIS结构测量了SiO2气凝胶薄膜的介电性能,其介电常数可低于2.5。验正了薄膜的介电常数与孔洞率或折射率的计算公式;探讨了SiO2气凝胶薄膜的介电色散行为和介电极化机制,指出了薄膜的低介电常数是其纳米多孔结构和疏水性能共同作用的结果。
The dielectric properties of silica aerogel films were measured by metal/insulator/semiconductor (MIS) structure. The dielectric constant can be reduced to below 2.5. An empirical formula on dielectric constant and refractive index of silica aerogel film was acquired. Molecule polarization theory is introduced to interpret partially dispersive low dielectric constant. It is find that the low dielectric constant of silica aerogel film is the results of its high porosity and hydrophobic character.
出处
《新技术新工艺》
2008年第6期91-93,共3页
New Technology & New Process
基金
武器装备预研项目(41312040307)
关键词
SiO2气凝胶薄膜
低介电常数
介电性能
折射率
silica aerogel film
low dielectric constant
dielectric properties
refractive index
