摘要
镀膜生产线真空室经过一段生产时间以后,会积累大量的膜层溅射物,主要是在水屏蔽及输送辊道上,真空室的污染严重影响产品质量,必须进行检修保养。
A large amount of sputtered materials will be deposited on the water shielding and rollers in vacuum chamber after long term running of the coating line , which affects product quality significantly and regular maintenance is necessary.
出处
《玻璃》
2008年第6期42-43,共2页
Glass
关键词
磁控溅射
镀膜玻璃
水屏蔽
辊道
检修保养
magnetron sputtering, glass coat, water shielding, roller, maintenance