相位测量轮廓术中计量信息的最佳采样方式

Optimum scheme for sampling measurement information in phasemeasuring profilometry

通过将计量场强度分布表达为傅立叶形式，导出了简明的相位测量轮廓术（ＰＭＰ）相位求解式，并根据最小二乘原理论证了步进式相移实现ＰＭＰ的最佳采样方式．实验结果表明，最佳采样方式为等间距满周期采样．

By expressing intensity distribution as Fourier form measurement field, the concise phase solving formula is derived, and the optimum sampling scheme of step shifting PMP is also demonstrated by leastsquare method. The experimental results show that the optimum sampling scheme is the one with equal interval and full period sampling.