MEMS微型可编程光栅的研究现状(下)

Review of MEMS-based programmable gratings:Part Ⅱ

近十几年来,微机电系统——MEMS技术作为一种使能技术,在各个领域(如机械、生物、光学、射频、能源等)得到了迅速发展,并实现了一定的产业化应用,取得了良好的经济效益。光学MEMS使光学元器件具备了体积小、重量轻、性能稳定、成本及功耗低等显著优点,实现了器件中关键结构的动态可控性,这是传统技术所无法比拟的。本文将在前文的基础上,重点介绍国际上其他的科研机构在MEMS微型可编程光栅相关方面的研究情况,对于每一种光栅结构的特点、制作工艺及其面向的应用领域进行了详细说明,最后讨论了MEMS微型可编程光栅的发展趋势。

In the last two decades, Microelectromechanical System （MEMS） that is considered as an enabling technology achieves prominent development and great economical success in almost all the engineering and industrial fields, such as mechanical, optical, radio frequency （RF）, power, biological, etc. Optical MEMS endows optical devices with the advantages of smaller volume, lighter weight, better performances, lower cost and power consumption. And it makes the key structures of these devices dynamically controllable by exterior forces, which is almost impossible for traditional technologies. As a series of the previously reported paper, this one focuses on the state of the art in the fields of MEMS-based programmable gratings from other research institutions all over the world. Structural characteristics, manufacturing processes and potential applications of these microgratings are described in detail. Finally, the development trend of MEMS-based programmable gratings is also discussed.