射频、直流磁控溅射和多弧离子镀沉积类金刚石薄膜的拉曼光谱分析

Raman Spectra of Diamond-Like Carbon Films Prepared by RF-Magnetron Sputtering,DC-Magnetron Sputtering and Multiple-Arc Ion Plating

用射频、直流磁控溅射和多弧离子镀制备一系列类金刚石(DLC)薄膜样品,并测量了样品的拉曼光谱。通过数据分析发现三种沉积方式中多弧离子镀沉积得到的薄膜含有更高的sp3含量。采用多弧离子镀设备,在不同的溅射负偏压下沉积了一系列的DLC薄膜样品,对样品进行拉曼光谱测试,通过对比分析发现随着沉积负偏压的提高,薄膜内sp3的含量不断提高。表明可以通过提高多弧离子镀的负偏压来提高DLC薄膜的质量。

RF-magnetron sputtering,DC-magnetron sputtering and multiple-arc ion plating are used to deposit a series of diamond-like carbon samples. Raman spectra of the samples were measured and analyzed. The DLC films which have the highest sp^3 content are prepared by multiple-arc ion plating. Then a series of diamond-like carbon samples were deposited by mUltiple-arc ion plating under different negative biases. By analyzing the Raman spectra,sp^3 content in the DLC films increased with negative biases. It＇s possible to get high quality DLC films by increasing negative biases by multiple-arc ion plating method.