CZ单晶炉单晶等径生长计算机控制系统

The Computer Control System for Single Crystal Growing with a Constant Diameter in CZ Crystal Growing Furnace

本文介绍了CZ单晶炉单晶等径生长计算机控制系统，简述了计算机硬件结构和软件设计原理。

This paper describes the computer system for single crystal growing with a constant diameter in CZ crystal growing furnace,and introduces the design prineiple of hardware and software.