摘要
综述了飞秒激光微加工技术国内外的研究现状,介绍了飞秒激光微加工在光学、微电子及生物医学等领域的应用,展望了飞秒激光微加工技术未来发展的趋势以及需要解决的关键技术。
The recent progress of femtosecond laser micro-processing was reviewed, and the applications of femtosecond laser micro-processing were introduced in some areas including optics, micro-electronics, biomedicine and so on. Furthermore, the development trends of femtosecond laser micro-processing and some key techniques which demand to be solved were prospected.
出处
《金属热处理》
CAS
CSCD
北大核心
2008年第6期8-13,共6页
Heat Treatment of Metals
基金
广东省科技攻关项目(2006A10405002)
关键词
飞秒激光
应用
微加工
进展
femtosecond laser
applications
micro-processing
development
