SnO_2纳米棒CH_4传感器的自组装研究

Self-Assembled Study on CH_4 Sensitive Property of SnO_2 Nanorods Gas Sensor

为了能够对低浓度的cH4进行灵敏探测以减少煤矿生产过程中瓦斯爆炸的概率，通过热蒸发SnO2和活性炭混合粉末的自组装制备方式直接在Cr-Au梳状交叉电极上合成了一层SnO2纳米棒气敏层，从而研制出自组装型SnO2纳米棒气敏传感器。经测试，发现此传感器对于浓度为10×10^-6 - 500×10^-6的CH4具有非常好的探测灵敏度，继而从气敏机制、自组装制备方式、SnO2纳米棒的比表面特性及SnO2纳米棒的尺度低于德拜长度等角度解释此传感器对CH4具有高气敏性的原因。

In order to decrease the ratio of gas explosion by investing the CH4 with lower concentration, SnO2 nanorods gas sensors have been synthesized by self-assembled fabrication method that the SnO2 nanorods sensing layer were directly synthesized on the Cr-Au comb-shape interdigitating electrodes by thermal evaporation of SnO2 and active carbon mixture powders. The sensors have highly gas sensitivity property to the rather lower CH4 concentration at the range of 10 × 10^-6 to 500× 10^-6. The highly gas sensing property of the SnO2 nanorods to CH4 was explained by the gas sensing mechanism, the self-assembled fabrication, the relative higher surface-to-volume ratio of SnO2 nanorods, the smaller size of the SnO2 nanorods than the Debye length.