用喷雾热分解方法制备PZT薄膜及其铁电特性的研究

Studies of Preparation and Ferroelectric Properties of PZT thin Films by Nebulized Soray Pyrolysis Method

用喷雾热分解方法制备PZT薄膜，由TGA和DTA确定其退火温度，由XRD和SEM研究其结构特性，用电容-电压技术研究其铁电特性，研究发现：Sawyer-Tower桥测定的C-V曲线与电容-电压技术的结果不同，其铁电性质如电滞回线、Ec和Pr、回线中心的位移、对称性等依赖于测量频率。

PZT thin films were prepared by the nebulized spray pyrolysis method. Annealing temperature was confirmed by TGA and DTA analyses of heat-treatment. The structural properties of the PZT films were studied by X-ray diffraction （XRD） and scanning electron microscopy （SEM）. The ferroelectrics characteristics were investigated by the capacitance-voltage （C-V） technique. However, those results were different from the results obtained by Sawyer-Tower Bridge. The two C-V curves, sweeping up and down, were not symmetric. By the measurement of Sawyer-Tower Bridge, it was found that the ferroelectrics properties, such as hysteresis loop, Ec and Pr, shift of the center of hysteresis loop, and symmetry, depended on the measurement frequency.