高可靠性声体波微波延迟线研究

Study on Bulk Acoustic Wave Microwave Delay Line with High Reliability

通过优化换能器设计和采用双面光刻、超声键合和密封封装等技术,研制出中心频率f0=4 300 MHz,-3 dB带宽Δf-3 dB≥200 MHz,延迟时间Δt=0.358μs的声体微波延迟线。通过试验验证,该产品具有高可靠性和良好的环境适应性,取得了满意的实用效果。

A microwave bulk acoustic wave delay line with centre frequency f0=4 300 MHz, bandwidth △f-3 dB ≥200 MHz, delay time △t：0. 358 μs was developed by optimized transducer design, double sides Photolithography, supersonic wire bonding and fully hermetic package technologies. The device had high reliability and excellent adaptability validated by experimentations with satisfactorily practical effect.