大型高真空退火炉的热设计

HEAT DESIGN OF LARGE HIGH VACUUM ANNEALING FURNACE

介绍了大型高真空退火炉的热设计。用表面负荷法、容积负荷法、热平衡法对退火炉所需的加热功率进行了估算。采用对工作区域进行全方位加热的方法，提高了工作区域温度的稳定性，与加热体周向布局相比，大大降低了炉体的高度。炉体材料用不锈钢，加热体材料用钼丝。３ｈ内，用１８０ｋＷ加热功率将直径１．６ｍ、高１．７ｍ的工作区域加热到８００℃，炉温稳定后测得工作区域内的最大温差为８℃，定点温度稳定性优于±３℃。

This paper describes the heat design of the large high vacuum annealing furnace. The required power is calculated by the surface load method, the volume load method and the heat balance method. The furnace is heated in all positions the working zone and it makes the stability and the equilibrium of the temperature better in the working zone,and the height of furnace is lower comparing with the heating body with circular arrangement. The material of furnace is stainless steel and the heating body is molybdenum. In 3 hours the zone with the height of 1.7 m and the diameter of 1.6 m is heated to 800 ℃with 180 kW.The most difference of the temperature is 8 ℃ and the stability of the setting point is less than ±3 ℃ after the temperature of the furnace is stable.