表面粗糙度干涉图像处理系统

Surfiace Roughness Interferogram Processing System

介绍了表面粗糙度干涉图像处理系统和该系统以静态干涉图像处理技术对表面粗糙度检测的过程。该系统通过对一帧白光干涉图像的处理，可对Ra值≤0．2μm的多刻线样板、试件表面粗糙度绝对、非接触、快速、自动地测量；该系统通过对白光和纳光二帧干涉图像的联合处理，以白光定位、纳光定度可对沟槽深度H≤5μm的标准单位刻线深度绝对、非接触、准确地测量。

This paper introduces surface roughness interferogram processing system and how to use it to measure surface roughness by computer based image processing technology. The system can measure Ra ≤ 0. 2 μm multi -gloove specimen and testing surface by processing a white light interferogram, and measure H≤5 μm step height by processing a white interferogram and sodium light interfrogram, former for height measurement and later CCD calibration with the advantages of absolution, non -contact, high speed and automation .