摘要
建立一个低能电子在多元多层介质中散射ＭｏｎｔｅＣａｒｌｏ模拟计算方法。低能电子在多元介质中弹性散射用Ｍｏｔ截面描述并应用作者提出的平均散射截面方法进行模拟计算；给出多元介质中修正的Ｂｅｔｈｅ方程计算低能电子非弹性散射能量损失。计算了低能电子在电子束曝光胶中能量沉积分布。
A Monte Carlo method on low energy electron (LEE) scatttering in multilyer and polybasic medium is proposed. The Mott cross section applies for discribing the elastic scattering of LEE, and the idea of mean cross section is suggested to simulate LEE elastic scattering in polybasic medium; the modified Bethe formula in polybasic medium is used for calculating energy loss of LEE inelastic scattering. The energy dissipation distributions of LEE in PMMA have been obtained.
出处
《计算物理》
CSCD
北大核心
1997年第4期499-501,共3页
Chinese Journal of Computational Physics
基金
国家自然科学基金
山东省高校中青年学科带头人基金
关键词
低能电子散射
电子束曝光
能量沉积
集成电路
low energy electron scattering
Monte Carlo method
electron beam lithography
energy dissipation.
