(002)取向AIN薄膜的Raman光谱

Raman Spectra of AIN Films Oriented in(002)

（００２）取向ＡＩＮ薄膜的Ｒａｍａｎ光谱赵永年王波何志罗微邹广田（吉林大学超硬材料国家重点实验室长春１３００２３）ＲａｍａｎＳｐｅｃｔｒａｏｆＡＩＮＦｉｌｍｓＯｒｉｅｎｔｅｄｉｎ（００２）ＺｈａｏＹｏｎｇｎｉａｎ，ＷａｎｇＢｏ，ＨｅＺｈｉ，ＬｕｏＷｅ...

Abstract AlN films oriented in (002) were prepared by RF sputtering. Raman spectra were measured by T6400 Raman spectrometer. A 1(TO),A 1(LO),E 1(LO) and E 2 Raman active modes and some Raman peaks of the hydrolysate were obtained.