摘要
本文采用微波氧等离子体刻蚀硬质合金基体表面,再利用热的浓碱溶液清除硬质合金表面所形成的氧化物,通过扫描电镜(SEM)观察了试样表面情况,并通过X射线能谱(EDAX)分析了硬质合金表面各成分变化情况。经过预处理的试样采用热丝化学气相沉积(HFCVD)金刚石薄膜,对所沉积出的金刚石薄膜采用SEM观察及压痕测试,发现经过氧等离子体处理的金刚石刀具较两步酸蚀法处理过的金刚石薄膜涂层,其附着性能有较大提高。
In this paper,microwave oxygen plasma-etching is used to etch cemented carbide surface and then hot concentrated NaOH solution is performed to eliminate the oxide on the substrate surface.The surface morphology of substrate was observed by SEM.The change of composition of cemented carbides surface was analyzed by EDAX analysis.The diamond films deposited by hot filament chemical vapor deposition（HFCVD）on the pretreated sample surface.The adhesion of the diamond films was tested by indentation testing.The results show that the adhesion of the diamond films tools with microwave oxygen plasma-etching has been greatly enhanced compared with treatment of two-step acid etching.
出处
《人工晶体学报》
EI
CAS
CSCD
北大核心
2008年第3期689-693,698,共6页
Journal of Synthetic Crystals
基金
湖北省科技攻关计划(No.2002AA105A02)
湖北省教育厅2004年创新团队项目
