聚四氟乙烯表面微摩擦学特性的改性

Modification of surface tribology characteristic of PTFE

利用离子注入系统PSⅡ和MEVVA80-10型离子注入机,采用射频磁控溅射和等离子束注入沉积两种技术,制备Ag、Al2O3、PTFE和Al2O3/PTFE纳米复合薄膜。采用XRD、AFM/FFM和纳米探针测试方法,研究5种薄膜改性聚四氟乙烯(PTFE)表面微摩擦学特性的效果。结果表明:在相同磨损测试条件下,离子注入技术制备的Al2O3/PTFE纳米复合薄膜的损伤深度比其他样品的浅,样品的耐磨性至少增加4倍;铝离子注入Al2O3/PTFE纳米复合膜的化学成分主要是Al、F、C、O和N;除C2F4峰外,还存在AlF3、Al2O3和AlN峰,且Al2O3为γ相,呈体心立方结构;薄膜硬度达到0.15、0.19和0.65 GPa;弹性模量为0.9、1.5和2.2 GPa。

Using ion implantation system PSII and MEWA80-10 ion implantation machine, Ag, Al2O3, PTFE, Al2O3/PTFE nanometer laminated films were prepared by RF magnetron sputtering and plasma beams into sedimentary. Using XRD, AFM/FFM and nanometer probe test method, the PTFE surface tribology characteristic of five kinds of modified films were studied. The results show that under the same test condition, Al2O3/PTFE nanometer laminated film＇s damage depth made by the ion implantation technology is shallower than those of other samples, while the wear resistance increases at least 4 times. The chemical composition of aluminum ion implantation Al2O3/PTFE nanometer compound films is mainly A1, F, C, O and N. AlF3, Al2O3 and A1N peaks exist as well as C2F4 peak, and Al2O3 is γ-phase with body-centered cubic structure. The hardness of the film achieves 0.15, 0.19 and 0.65 GPa. The elastic modulus is 0.9, 1.5 and 2.2 GPa.