摘要
通过采用直流磁控溅射法制备Fe/Pr/Cu多层膜,并在不同温度下进行高真空退火,同时用X射线衍射仪和四探针测试仪测量不同温度下样品的结构和磁电阻,最终可获得具有一定的周期性和层状结构的多层膜Fe/Pr/Cu.退火后其仍保持多层膜结构,但晶粒变大,磁电阻随磁场强度的增大而增大,GMR性能随退火温度的增大先增大后减小。Fe/Pr/Cu多层膜经不同温度相同时间热处理后,层间分离随温度的升高越来越明显,且磁电阻随温度的升高而增强。
Fe/Pr/Cu multilayer films were first prepared onto substrates with magnetron controlled sputtering method and then annealed at different temperatures. Then the Fe/Pr/Cu multilayer films were examined with XRD to analyse their structures and with conventional four probes method to analyse their giant magnetoresistance respetively. The results indicated that the Fe/Pr/Cu multilayer films have certain periodicity and samdwich and keep them after annealing. The magnetoresistance of the Fe/Pr/Cumultilayer films increased as the magnetic in- tensity increased. The GMR performance of the Fe/Pr/Cumultilayer films increased first and decreased later as the annealing temperature increased. The Fe,Pr and Cu separation was also increasingly obvious and the GMR effect increased along with the increase of annealing temperature.
出处
《桂林电子科技大学学报》
2008年第3期225-227,共3页
Journal of Guilin University of Electronic Technology
基金
广西自然科学基金项目(桂科基0575093)
关键词
Fe/Pr/Cu多层膜
退火温度
巨磁阻效应
磁控溅射
Fe/Pr/Cu multilayers
annealing temperature
giant magnetoresistance effect
magnetron controlledsputtering