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溅射法合成Al/Pb多层膜的结构与形貌研究 被引量:1

Microstructure of Al/Pb multi-layer foils made by sputtering
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摘要 铝铅合金的组织均匀性一直是其应用的瓶颈.本文通过溅射法制备了Al/Pb多层膜合金.经测试及FWHM计算,铝铅颗粒以纳米尺寸存在并分布均匀,实验分析表明,Al峰的消失与多层膜的生长方式有关,合金中存在一定量的非晶. Inhomogeneity in microstructure of Al/Pb alloy has been a bottleneck to its application. The microstructure and homogeneity of Al/Pb multi-layer foil prepared by sputtering was characterized by XRD and SEM. Experimental measurements and FWHM ( "full width at half amplitude" ) calculation showed that the Al/Pb particles in the layers were nanosizde and uniformly distributed, and the disappearance of the aluminum XRD peaks was associated with the growth mechanism of the multi-player foil. There existed a small quantity of amorphous phase in the foil.
出处 《南方金属》 CAS 2008年第2期1-3,共3页 Southern Metals
基金 国家自然科学基金资助项目(21004) 云南省自然科学基金资助项目(20020046)
关键词 溅射法 Al/Pb合金 纳米 非晶 sputtering method Al/Pb muti-layer foil nano-sized crystal amorphous phase
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参考文献8

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二级参考文献2

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