方型硅杯力敏器件计算机辅助设计

CAD of Square Silicon Cup Force Sensors

介绍了扩散硅力敏器件计算机辅助设计的方法。根据方型硅杯形式的有限元分析结果，计算力敏器件的性能。给出了方型硅杯形式的应力和热应力分布曲线以及力敏电阻灵敏度曲线。

A CAD method for diffusion silicon force sensor is introduced.According to the finite element analysis result for the square silicon cup,the performances of the force sensors have been calculated.This paper also presents the stress and heat stress distribution curves of the square silicon cup as well as the sensitivity curves of force sensors, which provides the theoretical basis for designing sensors and planar process patterns.