微电子机械技术的现状与发展

Present Situation and Trend of Development of Micro Electro Mechanical Technology

微电子机械技术是国际上新兴的科学前沿，它的发展会象微电子技术那样引发一场新的产业革命。本文介绍了微电子机械技术的主要工艺以及在微结构、微传感器、微执行器和微系统方面的研究进展。

Micro electro mechanical technology (MEMT) is a new scientific frontier worldwide. Its development will surely trigger another industrial revolution just as that of microelectronics did. This paper presents the main processes of MEMT as well as the situation of researches on microstructures, microsensors, microactuators, and microsystems, as well as the trend of development.