摘要
】微电子机械技术是国际上新兴的科学前沿,它的发展会象微电子技术那样引发一场新的产业革命。本文介绍了微电子机械技术的主要工艺以及在微结构、微传感器、微执行器和微系统方面的研究进展,并对今后的研究动态进行了论述。
Micro electro mechanical technology (MEMT) is a new scientific frontier worldwide. Its development will surely trigger another industrial revolution just as that of microelectronics did. This paper presents the main processes of MEMT as well as the situation of researches on microstructures, microsensors, microactuators, and microsystems, as well as the trend of development.
出处
《仪表技术与传感器》
CSCD
北大核心
1997年第6期1-2,5,共3页
Instrument Technique and Sensor