声表面波的衰减与声表面波传感技术

The Attenuation of Surface Acoustic Wave and SAW Sensing Technology

首先研究声表面波器件沉积有机薄膜时引起的表现波衰减，从理论上分析了声表面波器件性能变化问题，然后研究了采用ＳＡＷ谐振器对有机气体进行检测时，膜层引起的衰减对传感器性能的影响。

The attenuation of SAW device coated with organic film have been studied and the changes of SAW performance are studied theoretically.Then,the attenuation effect of film on the performance of sensor is analysed when a SAW resonator is adopted to detect organic vapour.The aim of these works is at how to use SAW device correctly and efficiently.