摘要
本文介绍了一种全新结构的压电角扫描器PZTA,在对PZT材料压电变形研究的基础上,开展了用逆压电效应进行大角度可控光扫描的探索性工作,并成功实现了可用于低温扫描的压电角扫描器。
This paper introduces a new kind of piezoelectric optical scanner PZTA.By studying the piezoelectric deform of PZT ceramic material in the electric field.We have explored ways and by means of“big” angle controlled laser scanning with converse piezoelectric effect, and developed a new optical scanner that can be used under an ultra cold environment. In this paper, the performance of PZT Bimorph stack and theory of PZTA are introduced, the theorial analysis and experiment test on PZTA are also present.
出处
《仪器仪表学报》
EI
CAS
CSCD
北大核心
1997年第5期496-500,共5页
Chinese Journal of Scientific Instrument
基金
国家高技术863资助