摘要
微悬臂梁传感器以其体积小、成本低、灵敏度高等优点在生物化学领域获得了广泛的研究和初步应用。详细阐述了微悬臂梁传感器的工作原理,包括其工作模式、读出技术、设计与制造等内容,并在此基础上对微悬臂梁传感器在生物化学领域的应用作了介绍。
Microcantilever-based sensors have been widely researched and begun to be used in chemistry and biology due to their advantages such as small volume, low cost and high sensitivity. In this paper, the principle of microcantilever-based sensors was introduced in detail, including their working mode, read-out technology, design and manufacturing etc. Then their applications in chemistry and biology were presented.
出处
《电子工业专用设备》
2008年第6期10-14,共5页
Equipment for Electronic Products Manufacturing
基金
国家"863"计划资助项目(批准号:2005AA404210)
关键词
微悬臂梁
传感器
读出技术
Microcantilever
Sensor
Read-out technology
