光刻机的防死锁调度

Deadlock-free Scheduling of Photolithography Equipment

半导体生产线是目前世界上公认的最复杂的制造系统之一。光刻机是半导体晶圆制造的瓶颈设备,其费用相当昂贵。光刻机由若干个自动组合装置组成,如果调度不当,生产可能会出现死锁。死锁的发生不仅大大降低光刻机的效率,而且破坏晶圆质量。本文利用图论的算法编制软件并进行仿真可以得到无死锁的调度方案。

Semiconductor manufacturing system is probably one of the most complex manufacturing processes in today's world. Photolithography equipment, the bottleneck and the most expensive equipment in wafer fabrication, is comprised of serial cluster tools. If scheduled inappropriately, deadlock may occur, which not only reduces the efficiency of the photolithography equipment, but also damages the wafer. We present in this paper a graphic approach to model the photolithography equipment, so as to get a deadlock-free schedule.