MgB_2超导薄膜制备方法对比研究

A contrastive study on fabrication technique of MgB_2 superconducting thin film

文章结合MgB2超导薄膜在电子器件中的应用,简介了混合物理化学气相沉积法、脉冲激光沉积法、磁控溅射法、分子束外延法和电子束蒸发法等MgB2超导薄膜制备方法和研究进展,并对主要的MgB2超导薄膜制备方法进行了比较,提出了改进意见.对MgB2超导薄膜的应用前景作了展望.

Taking consideration of the application of MgB2 superconducting thin film in electronic apparatus, the fabrication techniques and progress of MgB2 thin film such as hybrid physical-chemical vapor deposition, pulsed laser deposition, magnetron sputtering, molecular beam epitaxy and E-beam Evaporation are briefed. The main synthesis methods are compared and some suggestion for improving the quality of thin film is suggested. The application prospect of MgB2 superconducting thin film is presented.