关于涡轮分子泵的安全使用问题

On the safe operation of turbomolecular pump

本文叙述了关于涡轮分子泵安全使用的一些技术问题。首先对涡轮分子泵的构造特点作了介绍,其次对涡轮分子泵的故障类型、损坏原因,进行了分析。最后从设计和使用上的安全对策进行了讨论,以便更好的使用涡轮分子泵。

Some technological problems are discussed for the safe operation of turbomolecular pumps, According to the constructional characteristics and types and causes of possible troubles/damages of the pumps, what measures are to be taken and how to make them true are both analyzed in detail with the aim of safer operation, based on the design of different types of turbomolecular pumps and relevent operating procedures.