摘要
本文研究了溅射气氛中氮含量及后续热处理对射频溅射法制备的Ｆｅ－Ｎ薄膜的磁性能的影响。电镜分析的结果显示，样品中含有少量Ｆｅ１６Ｎ２。
The relationship between the magnetic properties of RF sputerring iron nitrogen thin films and the content of N 2 in sputerring gas is studied.The experiment of the effect of heat treatment on the properties of Fe N thin films was carried out.The results of EMS show that there is a little of Fe 16 N 2 in the films.
出处
《金属功能材料》
CAS
1997年第6期274-276,共3页
Metallic Functional Materials
关键词
磁性能
射频溅射
铁氮薄膜
magnetic properties,Fe N thin film,RF sputerrmg
