磁性薄膜微波电磁参数测试方法研究进展

Research progress of measured methods for microwave electromagnetic parameter of magnetic thin films

Fe、Co基合金薄膜具有高磁导率、高损耗等特点,可实现微波的宽频带吸收,是一类具有很大发展潜力的新一代吸波材料。磁性膜的复磁导率对吸波性能有重大影响,因而在吸波材料研究中提出了磁谱测量的紧迫要求。综述了国内外磁性薄膜电磁参数微波测量方法,主要介绍了磁性薄膜电磁参数的谐振腔法、双线圈法和传输线法,并对当前研究中存在的问题进行了讨论。

The Fe, Co-based alloy thin films were considered to be newly potential microwave absorbing materials On account of the high permeability, high loss, etc. The complex permeability of magnetic thin films was a significant parameter for the microwave-absorbing capability, and thus the measurement of the complex permeability of this films was proposed to be urgent. A series of electromagnetic parameters measured methods of thin film, such as the cavity perturbation method, the pick-up coil method and the transmission line method, were critically reviewed at home and abroad. The problems in these methods were discussed.