同步辐射光束线六杆并联机构的逆运动学精确求解及应用

Exact solutions and applications of the inverse kinematics of six-bar parallel mechanism in synchrotron radiation beam-line

目前同步辐射光束线六杆并联机构应用广泛,但六杆并联机构六维调节缺乏理论指导,调节困难,工作效率较低,为提高收敛速度和调节精度,本文分析了并联机构的特性,从相关物理模型出发,运用坐标变换法详细分析了六杆并联机构的逆运动学问题,得到六杆长度的精确求解方程组。采用MATLAB软件对系统仿真计算,得到相应的杆长变化曲线。实例应用结果表明,该方法快速有效,线性调节分辨可高于5μm,转角分辨可高于3",完全满足实际要求,为同步辐射光束线光学平台的精密调节提供了理论依据。

Six-bar parallel mechanism is widely used in synchrotron radiation facilities for X-ray optics of the beam-lines. The six-dimensional adjustment, however, is difficult and inefficient without theoretical direction. To achieve improved speed and accuracy of the six-dimensional adjustment, characteristics of the parallel mechanism are analyzed. By means of coordinate transformations, the inverse kinematics of six-bar parallel mechanism is studied, and the precise equations for six bars length are obtained. Curves of six bars length are represented after simulating and calculating by MATLAB. The result shows that the method is fast and efficient, the linear resolution can be better than 5 μm and the rotational resolution can be better than 3″. This method satisfies practical requirement and provides a theoretical foundation for the platform＇s fine adjustment in synchrotron radiation beam-line.