高精度抛物面镜光轴偏角分析仪

Axis Angle Error Analyzer of the Rotational Paraboloid Mirror

针对大数值孔径旋转抛物面反射镜对倾斜入射光线较大的散焦和离焦问题,本文设计一种用于大数值孔径旋转抛物面反射镜光轴偏角测量的系统,用于对大数值孔径旋转抛物面反射镜光轴与结构轴的校准。该方法根据旋转抛物面反射镜成像原理,采用CCD作为成像器件,分析轴偏所带来的光斑偏移量。实验结果表明,系统达到偏角角度分辨率0.06′,最大可测角度3.65′,该参数可以满足抛物面反射镜用作接收光学系统的应用。

The parabolic mirrors with high Numerical Aperture （NA） are used as efficient light collectors and its focus with the slight deviations of the incident beam from the optical axis or from parallelism give rise to huge aberrations, A device is designed to measure and collimate the angle error between the optical axis and the structure axis of high NA parabolic mirrors. The imaging principle of the parabolic mirrors is used to analyze the angle error of the parabolic mirrors. The experimental result shows that we can get the angle distinguishing precision 0.06＇ and the maximum measurable region 3.65＇. The result can satisfy the application of the parabolic mirrors used as the light collector,