降低振动环式微机械陀螺同频干扰的方法研究

Methods to Reduce the Co-Frequency Interference of Vibrating Ring Gyroscope

受MEMS加工工艺等因素影响,振动环式微机械陀螺存在一定的不对称,引起检测端的同频干扰,导致检测信号的信噪比降低。通过对振动环式陀螺进行激励模态和检测模态的动力学分析,研究激励信号、干扰信号和Coriolis力之间相位关系,提出降低同频干扰的解决方法,以提高陀螺检测灵敏度。

Manufacturing defects of MEMS process causes asymmetric to structures of vibrating ring gyroscopy, thus it results in cofrequency interference of the sensor, which reduces the signal noise ratio. Dynamic analysis was used to find out the phase relationships among excitation force, interference signal and coriolis force of gyroscopy, therefore the methods to reduce the disturbances are proposed in order to improve the sensitivity of the sensor.