迈克尔逊干涉仪测量薄膜的折射率与厚度

Refractive Index and Thickness of Michelson Interferometer Measure Film

用迈克尔逊干涉仪测量薄膜折射率与厚度的方法,原理简单.通过测出动镜的移动量及观察相应的干涉条纹变化现象,就能计算薄膜的厚度,有较高的测量精度.并基于此装置进行实际测量,理论和实际相符的较好.

This paper has introduced the easy and simple method to determine film refractive index and thickness by Michelson interferometer. The film thickness of high precision can be determined by determining the motion quantity of moving mirror and observing the relevant interference fringe, on which actual determination has been carried out, whose theory and practice conform to each other.