摘要
论述了Cymer公司ELS-6000系列准分子激光器工作原理和激光器的各个组成模块。在应用方面,论述了激光束的传输方法和与Stepper通信接口的应用,最后论述了激光气体的安全使用,防止对工作人员造成伤害。
This article expounds the working principle of Cymer ELS-6000series laser and its comprised modules. In application, the article expoundes the transmited method of laser beam and communicated interface with stepper, finally the article describes safe use of laser gas to prevent staffs from harm.
出处
《电子工业专用设备》
2008年第7期60-62,共3页
Equipment for Electronic Products Manufacturing
