TiN/Ti多层膜调制比对摩擦磨损行为影响的研究

Influence of Modulating Ratio on Friction and Wear Behavior of TiN/Ti Multilayer Coatings

考察了TiN/Ti多层膜调制比对其摩擦磨损行为的影响.采用磁过滤阴极弧沉积的方法制备了具有不同调制比的TiN/Ti多层膜,用扫描电镜和透射电镜对其层状结构及子层结构进行了观察和分析.用纳米压痕和SRV摩擦磨损试验的方法,对多层膜进行了纳米硬度和弹性模量测试以及摩擦磨损实验.结果表明,所制备的TiN/Ti多层膜层状结构清晰,与基底结合良好,调制比对多层膜的硬度和磨损特性影响较大,而对摩擦系数的影响却不明显.结合实验结果,讨论了硬度与弹性模量的比值(H/E值)对TiN/Ti多层膜耐磨性的影响.

Influence of modulating ratio on friction and wear behavior of TiN/Ti multilayer coatings was studied. Filtered cathode vacuum arc（FCVA） deposition method was applied in preparation of TiN/Ti multilayer coatings with different modulating ratios. Scanning electron microscope （SEM） and transmission electron microscope （TEM） were used in the film structure observation and individual layer analysis. Furthermore, nanohardness and elastic module were tested by nano-indenter and the friction and wear experiment was carried out on SRV tester. The experimental results show clear laminate structures in TiN/Ti multilayer coatings and good bonding between film and substrate. Nanohardness and the wear behavior are influenced remarkably by modulating ratio. Influence of modulating ratio on friction of multilayer coatings is relatively weak. Finally, the relationship between the ratio of hardness and elastic module （H/E） and the wear behavior of TiN/Ti multilayer coatings is discussed.