工艺参数对Ti合金表面电弧离子镀TiAlN涂层的性能影响

Effect of Process Parameters on Properties of TiAlN Arc Ion Coating on Ti Alloy Surface

综合分析了电弧离子镀中氮气分压、阴极弧流、基体偏压等工艺参数对在Ti合金表面制备TiAlN涂层的影响,及涂层性能与工艺参数的相互关系。并简要介绍了在TC4钛合金表面镀制TiAlN涂层的优化工艺参数。

The effects of process parameters （ N2 partial pressure,arc current of cathode,base bias） on properties of TiAIN arc ion coating on the surface of Ti alloy were discussed. The relations between coating properties and process parameters were analyzed. And optimization process parameters of TiAlN coating on the surface of TC4 titanium were briefly introduced.