摘要
提出了以计算机控制光栅产生莫尔条纹来测量物体三维形貌的新方法.利用计算机控制空间光调制器(Space Light Modulator,SLM)产生可控制幅度及位相的理想光栅,将平行光波投影到待测物体上,其反射光通过参考光栅形成莫尔条纹,利用CCD接收并进行数字图像处理,恢复出待测物体的三维形貌.对此方法进行了理论分析,推导了变形莫尔条纹与待测物形貌变化的关系式.利用MATLAB对此关系式进行仿真计算,其准确度可达0.011μm.
A new method of measuring 3-D shape, which uses the computer control grating to produce moiré stripe, is proposed. In order to produce the ideal grating with controllable amplitude and phase, the computer is used to control the Space Light Modulator（SLM）. The parallel light projects the aim object and the echo light forms moiré stripe through reference grating. The CCD is used to store the moiré stripe and the 3-D shape of the aim object is gotten by processing the digital image. The theory of the method is analyzed and the relational expression of the deformed moiré stripe and the object shape is derived. The expression is simulated by MATLAB and the precision of 0. 011 μm is obtained.
出处
《光子学报》
EI
CAS
CSCD
北大核心
2008年第7期1425-1428,共4页
Acta Photonica Sinica
基金
陕西省教育厅专项科研计划(05JK221)资助
