快速退火Sol-Gel PZT铁电薄膜的性能研究

Properties of Sol-Gel PZT Thin Film Annealed by Rapid Thermal Processing

报道了以乙酸铅、乙酸氧锆和钛酸正丁酯为原料，用溶胶-凝胶（Sol-Gel）法，经多次旋转涂膜，在Pt／Ti／SiO2／Si衬底上制备了PZT凝胶薄膜。用快速退火（RTA）作薄膜的热解和结晶热处理，制备了以（100）取向为主的PZT薄膜。用X射线衍射（XRD）和RT66A测试了膜的结晶取向、漏电流、电滞回线和抗疲劳性能等。结果表明，经RTA处理的溶胶凝胶法PZT膜具有良好的性能。

Using Pb (OOCCH3)2, ZrO (OOCCH3 )2 and Ti (OCH9)4 as the raw materialsof Sol - Gel Method, the PZT thin films were prepared by multi - spin coating and rapid thermal annealing (RTA). The propertics (crystal orientation, P - E loop, leakage current and fatigue) of the films were investigated by X - ray diffraction (XRD) and the RT66A standardized tester. The results show that the PZT films prepared by Sol - Gel method and rapid thermal anncaling have good quality and (100) orientation mainly.