摘要
金刚石膜是一种具有巨大应用潜力的新型功能材料, 但是它极高的硬度和良好的化学稳定性使其难以被加工成型, 因此如何对金刚石膜表面进行精确的图形化加工是实现制造金刚石器件的关键技术问题之一。系统地介绍了金刚石表面各种图形化的技术, 并且比较了它们的优缺点。
CVD diamond is a promising functional material and has attracted increasing interest, but it is so extrahard and chemically stable that it is difficult to be etched and fabricated. Thus, the technique of morphologically machining CVD diamond is one of the key technique in realizing diamond devices manufacture. According to the practical requirement of diamond film, several patterning techniques of diamond film are described. The advantages and disadvantages of these techniques are analyzed.
出处
《真空与低温》
2008年第2期63-67,共5页
Vacuum and Cryogenics
基金
国家自然科学基金(No:50572075)资助
湖北省教育厅Q20081505项目(2004)资助