摘要
利用电子背散射衍射、扫描电镜和X射线衍射技术研究了CVD自支撑金刚石薄膜的孪晶组织形貌、孪晶界和晶体取向差分布。研究表明,金刚石薄膜中存在一阶和二阶孪晶,不同的孪晶取向转变过程能形成不同的孪晶组织形貌,高频率的孪晶能对薄膜织构产生明显影响。
The twin morphology, twin grain boundary and misorientations distribution in CVD free standing diamond films were investigated by electron backscatter diffraction, SEM and X ray diffraction technology. The results show there are first-order and second-order twins in diamond films, different twin morphology can be formed for different process of twin orientation transformation,texture will be effected obviously by the high frequency twins.
出处
《物理测试》
CAS
2008年第4期1-5,共5页
Physics Examination and Testing
基金
国家自然科学基金(50372007)
河南科技大学博士科研基金
关键词
金刚石薄膜
孪晶
电子背散射衍射
取向差
织构
diamond film
twin
electron backscatter diffraction
misorientation
texture
