摘要
介绍了一种用于石英挠性加速度计的伺服电路。通过对内部的差动电容检测器进行激光修调,使该伺服电路的零偏电流小于1.33μA。低零偏电流的特点大大地提高了本伺服电路响应加速度时输出电流的精度,即提高了所检测加速度值的精度。
A servo-circuit of Q-FLEX accelerometer is introduced in this paper.By laser trimming the differential capacitance amplifier,the offset current of circuit is reduced to under 1.33μA.So offset current can improve the precision of output current of circuit when it is forced by an acceleration,in other words, it can improve the precision of the acceleration which detected by the circuit.
出处
《工业控制计算机》
2008年第7期88-89,共2页
Industrial Control Computer
关键词
加速度计
伺服电路
差动电容检测器
零偏电流
accelerometer,servo circuit,differential capacitance amplifier,offset current
