摘要
介绍MEMS传感器的特点和应用,功能安全的主要概念、原则和方法,以及对MEMS传感器构成的安全监控系统进行功能安全评估的范围和适用标准。
The article gives an overview of the features and applications of MEMS, as well asthe key concepts of functional safety, its principles and methods, consequently concluding the scope and appropriate standards for the functional safety assessment of MEMS sensor based safety monitor system.
出处
《中国仪器仪表》
2008年第7期23-26,36,共5页
China Instrumentation
