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氮气流量对金刚石膜生长的影响 被引量：2

Influence of the nitrogen concentration on the growth of large area diamond film
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摘要 采用电子辅助热灯丝化学气相沉积(EA-CVD)方法沉积大面积金刚石膜,在金刚石膜的沉积过程中,氮气流量对金刚石膜沉积的影响会直接影响着金刚石膜的生长和质量。用Raman等手段对金刚石膜的生长特性进行了表征。 Large area diamond films were deposited by EA-CVD method. During deposition, the growth and quality of diamond films were influenced by the change of the nitrogen concentration. The growth property of diamond film was characterized using Raman spectram.
作者 赵利军 毕冬梅
机构地区 长春大学 人事处 长春大学 理学院
出处 《长春大学学报》 2008年第6期29-31,共3页 Journal of Changchun University
基金 863项目(2002AA325090)
关键词 金刚石膜 氮气流量 膜的质量 diamond film the nitrogen concentration quality of diamond films
分类号 O484 [理学—固体物理]
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参考文献6

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同被引文献10

  • 1成绍恒.氮气对金刚石膜生长的影响研究[D].吉林:吉林大学,2009.
  • 2Srinivasan S, Hiller J, Kabius B, et al. Piezoelectric/ Ultrananocrystalline Diamond Heterostructures for High-Performance Multifunctional Micro/Nanoelectro- mechanical Systems[J]. Applied Physics Letters, 2007, 90(13) :134101 - 134101-3.
  • 3Xiao X, Wang J, Liu C,etal. In Vitro and in Vivo E- valuation of Ultrananocrystalline Diamond for Coating of Implantable Retinal Microchips[J]. Journal of Biomedic- al Materials Research Part B Applied Biomaterials, 2006, 77(2) :273-281.
  • 4Kulisch W, Popov C. On the Growth Mechanisms of Nanocrystalline Diamond films[J]. Physica Status Solidi Applications ~ Materials, 2006, 203(2):203-219.
  • 5Hu Q, Joshi R K, Kumar A. Electrons Diffusion Study on the Nitrogen-Doped Nanocrystalline Diamond Film Grown by MPECVD Method[J]. Applied Surface Sci- ence, 2010, 256(21) :6233-6236.
  • 6Lin C R, LiaoW H, WeiD H, etal. Formation of U1 trananocrystalIine Diamond Films with Nitrogen Addi tion[J]. Diamond & Related Materials, 2011, 20(3) 380-384.
  • 7王明磊,薛长山,姜宏伟,彭鸿雁.氩气、氮气对纳米金刚石膜形貌及结构的影响研究[J].黑龙江科技信息,2010(28):39-39. 被引量：4
  • 8侯雪,姜志刚,朱品文,郑艳彬,胡双,封全娇.氮气对DC-PCVD法制备金刚石薄膜影响的研究[J].金刚石与磨料磨具工程,2011,31(5):15-19. 被引量：3
  • 9李灿华,廖源,常超,王冠中,方容川.氮气氛下(100)织构金刚石薄膜的成核与生长研究[J].物理学报,2000,49(9):1756-1763. 被引量：9
  • 10陈苏琳,沈彬,张建国,王亮,孙方宏.CVD掺硅金刚石残余应力的X射线衍射和拉曼光谱分析(英文)[J].Transactions of Nonferrous Metals Society of China,2012,22(12):3021-3026. 被引量：10

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二级引证文献1

长春大学学报
2008年 第6期

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