吸收光谱型气体红外传感器的设计与实现

Design and Realization of Absorption Spectrum Gas Infrared Sensor

对一种吸收光谱型气体红外传感器的工作原理、设计原理和集成化设计进行了分析。其中气体浓度对光谱的吸收会影响光强的变化,所以将微型热释电红外敏感头、小型灯泡都集成在1个小型的气室中,气室中有2个通道,气体探测通道和参考通道。2个通道光强的强弱差就会体现出气体浓度的大小,这样就实现了测试气体浓度的功能。集成化采用MEMS工艺将红外双路敏感元件及滤光片制作成探测头,然后通过微封装和微小集成技术将探测头、红外光源、过滤网集成在气室内。

This paper designed a gas-absorption spectra infrared sensor, analyzed its working principle, design principle and integrated design. Concentration on these gases will affect the absorption spectra of light intensity changes, it integrated the micro- sensitive pyroelectric infrared head, small bulbs in a small chamber, and the chamber has a gas detector channel and a reference channel. The light intensity difference of the two channels reflects the size of gas concentrations, thereby realizes the function of testing gas concentrations. It adopted the MEMS technology to make the dual infrared sensor and filter into the detection probe, then microencapsulation technology integrated the tiny probe, infrared light and the filters in the momentum of integration.