摘要
为提高三维微细电火花加工的加工效率,从而达到工业应用目的,采用放电间隙伺服控制实时补偿电极损耗的技术路线,提出了三维微细电火花伺服扫描加工方法.基础实验验证了伺服扫描加工每层加工深度的一致性,研究了横向扫描加工速度对加工深度的影响规律.在小于1,mm2加工区域内的三维结构加工实验结果显示,伺服扫描加工可以便捷地实现三维微小结构的加工成型.进一步在工件与电极之间附加激振,可大幅度地提高放电脉冲的有效利用率以及加工效率.采用φ100,μm的钨丝电极,在铜试件上加工深度300,μm的典型三维形状,加工时间小于50,min.
To improve the machining efficiency of three dimensional micro electrical discharge machine （EDM） and then promote it into industrial use, a servo scanning EDM method was proposed in which electrode wear is compensated on real time by servo control of discharge gap. The consistency of machining depth on each scanning layer and the influence of transverse scanning velocity on machining depth were studied and verified experimentally. Machining experimental results show that 3D micro structures within the area of 1 mm2 can be shaped conveniently by use of the servo scanning EDM process. And the effective electrical discharge ratio and machining efficiency are greatly improved further when a vibration is assisted between electrode and workpiece. In the case of a typical 3D micro structure with 300 μm depth on copper plate, it can be machined within 50 min by using tungsten electrode of φ100μm.
出处
《纳米技术与精密工程》
EI
CAS
CSCD
2008年第4期307-311,共5页
Nanotechnology and Precision Engineering
基金
国家高技术研究发展计划(863)资助项目(2003AA404040)
国家重点基础研究计划(973)资助课题(2003CB716204)
